The 65h JSAP Spring Meeting, 2018

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7 Beam Technology and Nanofabrication » 7.5 Ion beams

[20a-B403-1~10] 7.5 Ion beams

Tue. Mar 20, 2018 9:00 AM - 11:45 AM B403 (53-403)

Toshio Seki(Kyoto Univ.), Junichi Yanagisawa(Univ. of Shiga Pref.)

10:45 AM - 11:00 AM

[20a-B403-7] Development of the Beam Detecting System Using Channel Electron Multiplier (CEM)

〇Shuhei Yamada1, Seki Toshio1, Aoki Takaaki2, Matsuo Jiro1 (1.Graduate School of Engineering, Kyoto Univ., 2.ACCMS, Kyoto Univ.)

Keywords:ion beam, SIMS, cluster