The 65h JSAP Spring Meeting, 2018

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7 Beam Technology and Nanofabrication » 7.5 Ion beams

[20a-B403-1~10] 7.5 Ion beams

Tue. Mar 20, 2018 9:00 AM - 11:45 AM B403 (53-403)

Toshio Seki(Kyoto Univ.), Junichi Yanagisawa(Univ. of Shiga Pref.)

11:00 AM - 11:15 AM

[20a-B403-8] Detection Sensitivity Improvement of Secondary Ion by Sodium Absorption with mist deposition method on PEG Surface

〇Taiki Matsuda1, Toshio Seki2, Takaaki Aoki3, Jiro Matsuo2 (1.Kyoto Univ., 2.Graduate School of Engineering, Kyoto Univ., 3.ACCMS, Kyoto Univ.)

Keywords:SIMS, cationization, cruster