10:45 AM - 11:00 AM
[20a-B403-7] Development of the Beam Detecting System Using Channel Electron Multiplier (CEM)
Keywords:ion beam, SIMS, cluster
Oral presentation
7 Beam Technology and Nanofabrication » 7.5 Ion beams
Tue. Mar 20, 2018 9:00 AM - 11:45 AM B403 (53-403)
Toshio Seki(Kyoto Univ.), Junichi Yanagisawa(Univ. of Shiga Pref.)
10:45 AM - 11:00 AM
Keywords:ion beam, SIMS, cluster