[20a-C202-1~8] 17.3 Layered materials

△ [20a-C202-3] Synthesis of Large Single Crystal and Monolayer WS₂ by Rapid Cooling Thermal CVD

〇(D)Chao Li¹, Toshiro Kaneko¹, Toshiaki Kato^1,2 (1.Tohoku Univ., 2.JST PRESTO)

Keywords:large size synthesis, chemical vapor deposition, single crystal and monolayer

We have developed a novel method to synthesize the large size single crystal and monolayer tungsten disulfide (WS₂) by cooling the reaction region rapidly during the CVD process, named rapid cooling CVD. As a result, single crystal and monolayer WS₂ was successfully synthesized up to 320 µm, which is one of the biggest triangles among the reported results ever. During the rapid cooling process, crystal can be grown into large size with the single crystal due to the increased precursor supply and highspeed crystal growth.