The 65h JSAP Spring Meeting, 2018

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7 Beam Technology and Nanofabrication » 7.1 X-ray technologies

[20p-B301-1~13] 7.1 X-ray technologies

Tue. Mar 20, 2018 1:15 PM - 4:45 PM B301 (53-301)

Mitsunori Toyoda(Tohoku Univ.), Takashi Imazono(QST), Norio Watanabe(Univ. of Tsukuba)

2:00 PM - 2:15 PM

[20p-B301-4] Quantum Yield of soft X-ray imaging device with a 1.4x1.4 μm2 pixel size

〇Takeo Ejima1, Tadashi Hatano1 (1.IMRAM, Tohoku Univ.)

Keywords:Image sensor in soft X-ray wavelength region, Quantum yield

The color filter on the front side of the commercially-available back-illuminated CMOS image sensor with a pixel size of 1.4 × 1.4 μm2 was removed and the fabricated image sensor was confirmed to have sensitivity in the soft X-ray wavelength region. The quantum efficiency of the fabricated image sensor will be reported.