[20p-P6-1~29] 15.4 III-V-group nitride crystals

[20p-P6-21] Theoretical Consideration on the Final Product of TMG Decomposition

〇(M2)Kazuki Sekiguchi¹, Hiroki Shirakawa¹, Kenta Chokawa¹, Masaaki Araidai^2,1, Yoshihiro Kangawa^3,2, Koichi Kakimoto³, Kenji Shiraishi^2,1 (1.Nagoya Univ., 2.IMaSS, Nagoya Univ., 3.RIAM, Kyushu Univ.)

Keywords:GaN, MOVPE, Thermodynamic Analyses