Fumikazu Mizutani

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Speaker, Author, Co-Author

Thu. Sep 19, 2019 1:15 PM - 5:00 PM E311 (E311)

Oral presentation
| 6 Thin Films and Surfaces
| 6.3 Oxide electronics

[19p-E311-1~14] 6.3 Oxide electronics

4:30 PM - 4:45 PM

[19p-E311-13] Atomic layer deposition of high purity Ga₂O₃ thin films using liquid precursor (GaCp *)

〇Fumikazu Mizutani¹, Shintaro Higashi¹, Mari Inoue², Toshihide Nabatame² (1.Kojundo Chem. Lab., 2.NIMS)