Akio Yoneyama

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Speaker, Author, Co-Author

Thu. Sep 19, 2019 1:30 PM - 4:30 PM E318 (E318)

Oral presentation
| 7 Beam Technology and Nanofabrication
| 7.1 X-ray technologies

[19p-E318-1~10] 7.1 X-ray technologies

2:30 PM - 2:45 PM

[19p-E318-5] Renewal of EUV beamline (BL18) at SAGA Light Source and feasibility exposures of PMMA resist

〇Akio Yoneyama¹, Taro Kawata^1,2 (1.SAGA Light Source, 2.Tokyo Institute of Technology)

4:15 PM - 4:30 PM

[19p-E318-10] Feasibility study of ns-time-resolved phase-contrast X-ray imaging using Si-APD linear array detector

〇Akio Yoneyama¹, Kazuyuki Hyodo², Shunji Kishimoto² (1.SAGA LS, 2.KEK PF)