Meiyong Liao

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Speaker, Author, Co-Author

Fri. Sep 20, 2019 9:15 AM - 12:00 PM E312 (E312)

Oral presentation
| 6 Thin Films and Surfaces
| 6.2 Carbon-based thin films

[20a-E312-1~10] 6.2 Carbon-based thin films

11:45 AM - 12:00 PM

▲ [20a-E312-10] On-chip Single Crystal Diamond MEMS with Electrical Actuation and Sensing

〇Meiyong Liao¹, Liwen Sang¹, Masataka Imura¹, Satoshi Koizumi¹, Yasuo Koide¹ (1.Nattional Institute for Materials Science)