Mikito Nozaki

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Speaker, Author, Co-Author

Sat. Sep 21, 2019 9:00 AM - 12:30 PM E301 (E301)

Oral presentation
| 13 Semiconductors
| 13.7 Compound and power electron devices and process technology

[21a-E301-1~13] 13.7 Compound and power electron devices and process technology

9:15 AM - 9:30 AM

[21a-E301-2] Evaluation of Reactive Ion Etching-induced Damage on 2DEG at AlGaN/GaN Interface

〇Mikito Nozaki¹, Daiki Terashima¹, Akitaka Yoshigoe², Takuji Hosoi¹, Takayoshi Shimura¹, Heiji Watanabe¹ (1.Osaka Univ., 2.JAEA)