Sumiko Fujisaki

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Speaker, Author, Co-Author

Wed. Sep 18, 2019 9:00 AM - 12:00 PM C309 (C309)

Oral presentation
| 8 Plasma Electronics
| 8.2 Plasma deposition of thin film, plasma etching and surface treatment

[18a-C309-1~10] 8.2 Plasma deposition of thin film, plasma etching and surface treatment

9:30 AM - 9:45 AM

[18a-C309-3] Cyclic Etching of Cobalt via Oxide and Organometallic Complex

〇Sumiko Fujisaki¹, Yoshihide Yamaguchi¹, Hiroyuki Kobayashi¹, Kazunori Shinoda¹, Masaki Yamada¹, Hirotaka Hamamura¹, Kohei Kawamura², Hiroto Otake², Masaeu Izawa² (1.Hitachi R&D, 2.Hitachi High-Tech)

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