Yohei Tanaka

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Speaker, Author, Co-Author

Wed. Sep 18, 2019 9:00 AM - 11:30 AM E205 (E205)

Oral presentation
| 3 Optics and Photonics
| 3.2 Equipment optics and materials

[18a-E205-1~9] 3.2 Equipment optics and materials

11:00 AM - 11:15 AM

[18a-E205-8] Beam quality control of DUV laser beam using random phase plate

〇Yohei Tanaka¹, Chen Qu¹, Yuki Tamaru¹, Hironori Igarashi¹, Atsushi Fuchimukai¹, Taisuke Miura¹, Junichi Fujimoto¹, Hakaru Mizoguchi¹ (1.Gigaphoton Inc.)

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