Yuri Mizukawa

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Speaker, Author, Co-Author

Wed. Sep 18, 2019 9:30 AM - 11:45 AM E304 (E304)

Oral presentation
| 13 Semiconductors
| 13.4 Si processing /Si based thin film / MEMS / Equipment technology

[18a-E304-1~9] 13.4 Si processing /Si based thin film / MEMS / Equipment technology

10:30 AM - 10:45 AM

[18a-E304-5] In-situ Monitoring for Visualization of Temperature Distribution in Molten Region on a-Si film during Atmospheric Pressure Thermal Plasma Jet Irradiation

〇Yuri Mizukawa¹, Asaki Kameda¹, Hiroaki Hanafusa¹, Seiichiro Higashi¹ (1.Hiroshima Univ.)