Hiroto Ishii

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Speaker, Author, Co-Author

Wed. Sep 18, 2019 1:15 PM - 5:00 PM B11 (B11)

Oral presentation
| 13 Semiconductors
| 13.5 Semiconductor devices/ Interconnect/ Integration technologies

[18p-B11-1~14] 13.5 Semiconductor devices/ Interconnect/ Integration technologies

3:45 PM - 4:00 PM

△ [18p-B11-10] Fabrication of Y₂O₃/Ge pMOSFETs through clean Ge surface

〇(M1)Hiroto Ishii^1,2, Hiroyuki Ishii², Wen Hsin Chang², Yukinori Morita², Akira Endoh¹, Hiroki Fujisjiro¹, Tatsuro Maeda^1,2 (1.TUS, 2.AIST)