Shota Komago

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Speaker, Author, Co-Author

Wed. Sep 18, 2019 1:15 PM - 5:00 PM B11 (B11)

Oral presentation
| 13 Semiconductors
| 13.5 Semiconductor devices/ Interconnect/ Integration technologies

[18p-B11-1~14] 13.5 Semiconductor devices/ Interconnect/ Integration technologies

4:00 PM - 4:15 PM

△ [18p-B11-11] Strain Evaluation of Laser or RTA Annealed Sn-doped SiGe Layers

〇Shota Komago¹, Ryo Yokogawa^1,2, Kazutoshi Yoshioka¹, Naomi Sawamoto¹, John Borland³, Takashi Kuroi⁴, Yoji Kawasaki⁵, Atsushi Ogura¹ (1.Meiji Univ., 2.JSPS Research Fellow DC, 3.J.O.B. Technologies, 4.Nissin Ion Equipment, 5.SMIT)

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