Kensuke Horiuchi

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Speaker, Author, Co-Author

Wed. Sep 18, 2019 1:15 PM - 5:00 PM B11 (B11)

Oral presentation
| 13 Semiconductors
| 13.5 Semiconductor devices/ Interconnect/ Integration technologies

[18p-B11-1~14] 13.5 Semiconductor devices/ Interconnect/ Integration technologies

4:45 PM - 5:00 PM

[18p-B11-14] Selective chemical vapor deposition of Cu on Ru using CuI

〇Kensuke Horiuchi¹, Tastuya Joutsuka¹, Satoshi Yamauchi¹ (1.Ibaraki Univ.)