Tatsuro Maeda

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Speaker, Author, Co-Author

Wed. Sep 18, 2019 1:15 PM - 5:00 PM B11 (B11)

Oral presentation
| 13 Semiconductors
| 13.5 Semiconductor devices/ Interconnect/ Integration technologies

[18p-B11-1~14] 13.5 Semiconductor devices/ Interconnect/ Integration technologies

3:15 PM - 3:30 PM

[18p-B11-8] GeOI Technology for Monolithic 3D CMOS integration

〇Tatsuro Maeda¹, Hiroyuki Ishii¹, Wen Hsin Chang¹, Toshifumi Irisawa¹, Yuichi Kurashima¹, Hideki Takagi¹, Noriyuki Uchida¹ (1.AIST)