Takeshi Uruma

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Speaker, Author, Co-Author

Wed. Sep 18, 2019 1:30 PM - 5:15 PM C310 (C310)

Oral presentation
| 6 Thin Films and Surfaces
| 6.6 Probe Microscopy

[18p-C310-1~14] 6.6 Probe Microscopy

4:45 PM - 5:00 PM

[18p-C310-13] Development of an atomic force microscope integrated with a scanning electron microscope for evaluating electronic devices

〇Takeshi Uruma¹, Nobuo Satoh², Hidekazu Yamamoto², Kenta Nakazawa³, Futoshi Iwata^1,3 (1.Graduate School of Sci. and Tech., Shizuoka Univ., 2.Chiba Ins. of Tech., 3.Shizuoka Univ.)

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