Haruki Takeuchi

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Speaker, Author, Co-Author

Wed. Sep 18, 2019 1:15 PM - 5:00 PM E214 (E214)

Oral presentation
| Joint Session M
| 22.1 Joint Session M "Phonon Engineering"

[18p-E214-1~13] 22.1 Joint Session M "Phonon Engineering"

1:15 PM - 1:30 PM

△ [18p-E214-1] Evaluation of Thermal Conductivity Characteristics in SOI Film Covered with Different Process Oxide Film by Raman Spectroscopy

〇Haruki Takeuchi¹, Ryo Yokogawa^1,2, Motohiro Tomita³, Takanobu Watanabe³, Atsushi Ogura¹ (1.Meiji Univ., 2.JSPS Research Fellow DC, 3.Waseda Univ.)