Tsanko Vaskov Tsankov

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Speaker, Author, Co-Author

Wed. Sep 18, 2019 1:45 PM - 4:00 PM F211 (F211)

Oral presentation
| 8 Plasma Electronics
| 8.6 Plasma Electronics English Session

[18p-F211-1~6] 8.6 Plasma Electronics English Session

1:45 PM - 2:15 PM

▲ [18p-F211-1] [INVITED] INCA: A new scalable large area plasma source at low pressures

〇Tsanko Vaskov Tsankov¹, Philipp Ahr¹, Uwe Czarnetzki¹ (1.Ruhr University Bochum)