Kazutaka Kanegae

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Speaker, Author, Co-Author

Wed. Sep 18, 2019 1:00 PM - 6:00 PM N302 (N302)

Oral presentation
| 13 Semiconductors
| 13.7 Compound and power electron devices and process technology

[18p-N302-1~18] 13.7 Compound and power electron devices and process technology

5:00 PM - 5:15 PM

△ [18p-N302-15] Quick measurement method for carbon-related defect density in n-type GaN layer by dual-color-sub-bandgap-light-excited isothermal capacitance transient spectroscopy

〇Kazutaka Kanegae^1,4, Tetsuo Narita², Kazuyoshi Tomita², Tetsu Kachi³, Masahiro Horita^1,3,4, Tsunenobu Kimoto¹, Jun Suda^1,3,4 (1.Kyoto Univ., 2.Toyota Central R&D Labs., 3.Nagoya Univ. IMaSS, 4.Nagoya Univ.)

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