Ukyo Sakurai

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Speaker, Author, Co-Author

Wed. Sep 18, 2019 4:00 PM - 6:00 PM PA4 (PA)

Poster presentation
| 6 Thin Films and Surfaces
| 6.2 Carbon-based thin films

[18p-PA4-1~25] 6.2 Carbon-based thin films

4:00 PM - 6:00 PM

△ [18p-PA4-22] Interface State Density Reduction of Diamond (111) MOS Structure and Channel Mobility Improvement of MOSFET by Hydrogen Plasma Treatment Introduction

〇(M2)Ukyo Sakurai¹, Tubasa Matsumoto¹, Masatsugu Nagai¹, HiromitsuKato Kato², Toshiharu Makino², Masahiko Ogura², Daisuke Takeuchi², Satoshi Yamasaki^1,2, Takao Inokuma¹, C. E. Nebel^1,3, Norio Tokuda^1,2 (1.kanazawa univ., 2.AIST, 3.Fraunhofer IAF)

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