Ayumu Hashimoto

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Speaker, Author, Co-Author

Wed. Sep 18, 2019 4:00 PM - 6:00 PM PB5 (PB)

Poster presentation
| Joint Session K
| 21.1 Joint Session K "Wide bandgap oxide semiconductor materials and devices"

[18p-PB5-1~36] 21.1 Joint Session K "Wide bandgap oxide semiconductor materials and devices"

4:00 PM - 6:00 PM

[18p-PB5-6] Structural properties of α - (Al_x Ga_1-x)₂O₃ thin films prepared by Mist CVD method

〇(B)Ayumu Hashimoto¹, Yuji Nakabayashi², Takeshi Kawae³, Satoru Yamada¹ (1.NITIC, 2.JAIST, 3.Kanazawa Univ.)