Shota Nunomura

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Speaker, Author, Co-Author

Thu. Sep 19, 2019 9:30 AM - 10:30 AM B32 (B32)

Oral presentation
| 8 Plasma Electronics
| 8.8 Plasma Electronics Award Speech

[19a-B32-1~2] 8.8 Plasma Electronics Award Speech

9:30 AM - 10:00 AM

[19a-B32-1] [Plasma Electronics Award Speech] Plasma-induced defects ~ towards defect-free semiconductor plasma processing ~

〇Shota Nunomura¹, Isao Sakata¹, Koji Matsubara¹ (1.AIST RCPV)