Masaru Irita

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Speaker, Author, Co-Author

Thu. Sep 19, 2019 9:00 AM - 12:00 PM E304 (E304)

Oral presentation
| 13 Semiconductors
| 13.4 Si processing /Si based thin film / MEMS / Equipment technology

[19a-E304-1~12] 13.4 Si processing /Si based thin film / MEMS / Equipment technology

9:00 AM - 9:15 AM

[19a-E304-1] Miniature Fuel Cell with Monolithically Fabricated Si Electrodes
-Characterization of Pd and Pt Atomic Layer Produced by Electrochemical ALD-

〇Masaru Irita¹, Soushiro Kobune¹, Tomohiro Kurose¹, Masanori Hayase¹, Natasa Vasiljevic² (1.Tokyo Univ. of Science, 2.Univ. of Bristol)