Yoshiyuki Watanabe

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Speaker, Author, Co-Author

Thu. Sep 19, 2019 9:00 AM - 12:00 PM E304 (E304)

Oral presentation
| 13 Semiconductors
| 13.4 Si processing /Si based thin film / MEMS / Equipment technology

[19a-E304-1~12] 13.4 Si processing /Si based thin film / MEMS / Equipment technology

9:15 AM - 9:30 AM

[19a-E304-2] MEMS Rogowski Coil with multi-TSV Current Terminal

〇Yoshiyuki Watanabe¹, Mutsuto Kato¹, Toru Yahagi¹, Hiroki Murayama¹, Shinji Kunori², Kenichi Yoshida², Kazuyuki Sashida², Daisuke Arai², Katsuya Ikeda², Ryosuke Ikeda², Toshiyuki Takemori² (1.Yamagata ResInsTech, 2.Shindengen)

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