[19a-E304-1~12] 13.4 Si processing /Si based thin film / MEMS / Equipment technology

[19a-E304-2] MEMS Rogowski Coil with multi-TSV Current Terminal

〇Yoshiyuki Watanabe¹, Mutsuto Kato¹, Toru Yahagi¹, Hiroki Murayama¹, Shinji Kunori², Kenichi Yoshida², Kazuyuki Sashida², Daisuke Arai², Katsuya Ikeda², Ryosuke Ikeda², Toshiyuki Takemori² (1.Yamagata ResInsTech, 2.Shindengen)

Keywords:Rogowski coil, MEMS, current sensor

We have fabricated an MEMS Rogowski coil current sensor for overcurrent detection in power devices (device size 10×10×0.3mm³). This device has a 137 turns spiral current sensing coil ( via diameter 100µm) and a vertical current terminal with multi-TSV. When the TSV current terminal was energized with a device using a high resistivity silicon substrate (> 10,000 Ωcm), stable current detection was realized.