Yongxun Liu

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Speaker, Author, Co-Author

Thu. Sep 19, 2019 9:00 AM - 12:00 PM E304 (E304)

Oral presentation
| 13 Semiconductors
| 13.4 Si processing /Si based thin film / MEMS / Equipment technology

[19a-E304-1~12] 13.4 Si processing /Si based thin film / MEMS / Equipment technology

9:45 AM - 10:00 AM

[19a-E304-4] Fabrication of piezoresistive pressure sensor using minimal deep-RIE and mask aligner

〇Yongxun Liu¹, Hiroyuki Tanaka^1,2, Kazuhiro Koga², Kazumasa Nemoto¹, Sommawan Khumpuang^1,2, Masayoshi Nagao¹, Takashi Matsukawa¹, Shiro Hara^1,2 (1.AIST, 2.MINIMAL)

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