Masaki Saito

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Speaker, Author, Co-Author

Thu. Sep 19, 2019 9:00 AM - 12:00 PM E304 (E304)

Oral presentation
| 13 Semiconductors
| 13.4 Si processing /Si based thin film / MEMS / Equipment technology

[19a-E304-1~12] 13.4 Si processing /Si based thin film / MEMS / Equipment technology

10:45 AM - 11:00 AM

△ [19a-E304-8] Measurement of Stress Distribution in Thin Film Mechanical Resonator by Micro-Raman Spectroscopy

〇(M1)Masaki Saito¹, Shin-ichi Warisawa¹, Reo Kometani¹ (1.Grad. Sch. of Front. Sci., Univ. of Tokyo)