Minoru Sasaki

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Speaker, Author, Co-Author

Thu. Sep 19, 2019 9:00 AM - 12:00 PM E304 (E304)

Oral presentation
| 13 Semiconductors
| 13.4 Si processing /Si based thin film / MEMS / Equipment technology

[19a-E304-1~12] 13.4 Si processing /Si based thin film / MEMS / Equipment technology

11:00 AM - 11:15 AM

[19a-E304-9] Fine Patterning on Roll Surface Using Photolithography for Frosted Aluminum Plate

Hideto Yuge¹, Hiroaki Suzuki¹, 〇Minoru Sasaki¹ (1.Toyota Technol. Inst.)