Sri Ayu Anggraini

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Speaker, Author, Co-Author

Thu. Sep 19, 2019 9:30 AM - 11:30 AM PB1 (PB)

Poster presentation
| 9 Applied Materials Science
| 9.1 Dielectrics, ferroelectrics

[19a-PB1-1~11] 9.1 Dielectrics, ferroelectrics

9:30 AM - 11:30 AM

▲ [19a-PB1-4] Effect of MgTa addition on the piezoelectric response of aluminum nitride thin films

〇Sri Ayu Anggraini¹, Masato Uehara¹, Kenji Hirata¹, Hiroshi Yamada¹, Morito Akiyama¹ (1.AIST)