Yuki Ueno

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Speaker, Author, Co-Author

Thu. Sep 19, 2019 1:15 PM - 6:45 PM E206 (E206)

Oral presentation
| 3 Optics and Photonics
| 3.15 Silicon photonics

[19p-E206-1~19] 3.15 Silicon photonics

5:30 PM - 5:45 PM

△ [19p-E206-15] Selective-area chemical vapor deposition of Ge on SiN_x layers

〇(M1)Yuki Ueno¹, Ryota Oyamada¹, Shun Sasaki², Tetsuya Nakai², Yasuhiko Ishikawa¹ (1.Toyohashi Univ. Tech., 2.SUMCO)