Atsuhiro Ohta

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Speaker, Author, Co-Author

Thu. Sep 19, 2019 1:45 PM - 5:45 PM E305 (E305)

Oral presentation
| 13 Semiconductors
| 13.3 Insulator technology

[19p-E305-1~15] 13.3 Insulator technology

3:30 PM - 3:45 PM

[19p-E305-8] Formation of Yttrium Silicate Thin Layer by Atomic Layer Deposition

〇Atsuhiro Ohta¹, Jinhan Song¹, Takuya Hoshii¹, Hitoshi Wakabayashi¹, Kazuo Tsutsui², Kuniyuki Kakushima¹ (1.Tokyo Tech. school of Eng., 2.Tokyo Tech. IIR)

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