Yoshiyuki Honda

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Speaker, Author, Co-Author

Thu. Sep 19, 2019 1:30 PM - 4:30 PM E318 (E318)

Oral presentation
| 7 Beam Technology and Nanofabrication
| 7.1 X-ray technologies

[19p-E318-1~10] 7.1 X-ray technologies

4:00 PM - 4:15 PM

△ [19p-E318-9] Elucidation of deterioration mechanism in protective film of collector mirror for EUV light source

〇Yoshiyuki Honda¹, Tatsuya Yanagida¹, Yutaka Shiraishi¹, Masayuki Morita¹, Masahiko Andou¹, Hiroaki Tomuro¹, Akifumi Matsuda², Mamoru Yoshimoto² (1.Gigaphoton Inc., 2.Tokyo Tech.)

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