Yuki Saho

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Speaker, Author, Co-Author

Fri. Sep 20, 2019 9:00 AM - 12:30 PM C309 (C309)

Oral presentation
| 6 Thin Films and Surfaces
| 6.1 Ferroelectric thin films

[20a-C309-1~13] 6.1 Ferroelectric thin films

9:15 AM - 9:30 AM

[20a-C309-2] Control of the preferential orientation and the crystal structure of HfO₂:Y/Si films by change in oxygen partial pressure

〇Yuki Saho¹, Daiki Kamada¹, Kenshi Takada¹, Daisuke Kiriya¹, Takeshi Yoshimura¹, Atsushi Ashida¹, Norifumi Fujimura¹ (1.Osaka Pref. Univ.)