Takanori Mimura

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Speaker, Author, Co-Author

Fri. Sep 20, 2019 9:00 AM - 12:30 PM C309 (C309)

Oral presentation
| 6 Thin Films and Surfaces
| 6.1 Ferroelectric thin films

[20a-C309-1~13] 6.1 Ferroelectric thin films

10:15 AM - 10:30 AM

△ [20a-C309-6] [Highlight] Room temperature deposition of Y: HfO₂ ferroelectric films by the sputtering method

〇(DC)Takanori Mimura¹, Takao Shimizu¹, Hiroshi Funakubo¹ (1.Tokyo Tech.)