Yuhei Wada

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Speaker, Author, Co-Author

Fri. Sep 20, 2019 9:00 AM - 12:15 PM E301 (E301)

Oral presentation
| 13 Semiconductors
| 13.7 Compound and power electron devices and process technology

[20a-E301-1~12] 13.7 Compound and power electron devices and process technology

11:00 AM - 11:15 AM

△ [20a-E301-8] Improvement of Gate Insulator Reliability by Controlling Diffusion into SiO₂ layer in SiO₂/GaN MOS Devices

〇(M1)Yuhei Wada¹, Nozaki Mikito¹, Hosoi Takuji¹, Shimura Takayoshi¹, Watanabe Heiji¹ (1.Osaka Univ.)