Hiroharu Kawasaki

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Speaker, Author, Co-Author

Fri. Sep 20, 2019 9:30 AM - 11:30 AM PA4 (PA)

Poster presentation
| 8 Plasma Electronics
| 8.2 Plasma deposition of thin film, plasma etching and surface treatment

[20a-PA4-1~14] 8.2 Plasma deposition of thin film, plasma etching and surface treatment

9:30 AM - 11:30 AM

[20a-PA4-1] Two-dimensional thin films preparation by PLD using powder target I

〇Hiroharu Kawasaki¹, Tamiko Ohshima¹, Yoshihito Yagyu¹, Takeshi Ihara¹, Masanori Shinohara¹, Yoshiaki Suda² (1.Nat. Ins. Tech, Sasebo Col., 2.Nat. Ins. Tech, Ishikawa Col.)

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