4:30 PM - 4:45 PM
▲ [20p-E310-13] High efficiency neutral-beam-etched nanodisk of InGaN/GaN MQWs buried with regrown GaN
〇Kexiong Zhang1, T. Takahashi1, N. Kumagai1, G. W. Cong1, D. Ohori2, K. Endo1, M. Shimizu1,3, S. Samukawa2, X. L. Wang1,3 (1.AIST, 2.Tohoku Univ., 3.Nagoya Univ.)