2:15 PM - 2:30 PM
△ [20p-E310-5] Growth of Al0.55Ga0.45N thick films on AlN templates with nano-sized patterned grooves
〇(M1)Shouhei Teramura1, Sakuragi Yusuke1, Yasue Shinji1, Tanaka Shunya1, Ogino Yuya1, Iwaya Motoaki1, Takeuchi Tsuya1, Kamiya Satoshi1, Iwayama Sho1,3, Akasaki Isamu2, Miyake Hideto3 (1.Dept. of Mat. Sci. & Eng., Meijo Univ., 2.Akasaki Research Center, Nagoya Univ., 3.Grad. Sch. of Reg. Inn. Stu., Mie Univ.)