6:00 PM - 6:15 PM
[20p-E311-17] Optically detected magnetic resonance of 3D arrayed silicon vacancies in SiC pn diodes
〇Yuichi Yamazaki1, Yoji Chiba1,2, Shin-Ichiro Sato1, Takahiro Makino1, Naoto Yamada1, Takahiro Satoh1, Yasuto Hijikata2, Kazutoshi Kojima3, Hidekazu Tsuchida4, Norihiro Hoshino4, Takeshi Ohshima1 (1.QST, 2.Saitama Univ., 3.AIST, 4.CRIEPI)