Kenta Nagai

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Speaker, Author, Co-Author

Sat. Sep 21, 2019 9:00 AM - 11:15 AM B31 (B31)

Oral presentation
| Joint Session K
| 21.1 Joint Session K "Wide bandgap oxide semiconductor materials and devices"

[21a-B31-1~8] 21.1 Joint Session K "Wide bandgap oxide semiconductor materials and devices"

11:00 AM - 11:15 AM

[21a-B31-8] Influence of Indium-precursors on Halide Vapor Phase Epitaxy of In₂O₃

〇Kenta Nagai¹, Nami Tanaka¹, Yuya Saimoto¹, Rie Togashi², Nao Takekawa¹, Ken Goto¹, Yoshinao Kumagai^1,3 (1.Tokyo Univ. of Agri. and Tech., 2.Sophia Univ., 3.TUAT IGIR)