Katsuyuki Miura

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Speaker, Author, Co-Author

Sat. Sep 21, 2019 9:00 AM - 12:30 PM E301 (E301)

Oral presentation
| 13 Semiconductors
| 13.7 Compound and power electron devices and process technology

[21a-E301-1~13] 13.7 Compound and power electron devices and process technology

9:00 AM - 9:15 AM

[21a-E301-1] Study on low damage etching of GaN using nitrogen plasma

〇Katsuyuki Miura¹ (1.Tokyo Inst.)