2:45 PM - 3:00 PM
[21p-E301-5] Fabrication of GaN and Diamond Direct Bonding for High Output Power Device Applications
〇Jianbo Liang1, Yasuo Shimizu2, Yutaka Ohno2, Kenji Shirasaki2, Yasuyoshi Nagai2, Makoto Kasu3, Seongwoo Kim4, Martin Kuball5, Naoteru Shigekawa1 (1.Osaka City Univ., 2.IMR Tohoku Univ., 3.Saga Univ., 4.Adamant Namiki Precision Jewel Col, Ltd., 5.Univ. of Bristol)