Yasuharu Kiyotou

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Speaker, Author, Co-Author

Sat. Sep 21, 2019 12:45 PM - 4:00 PM E310 (E310)

Oral presentation
| 15 Crystal Engineering
| 15.4 III-V-group nitride crystals

[21p-E310-1~12] 15.4 III-V-group nitride crystals

12:45 PM - 1:00 PM

[21p-E310-1] Etching depth control in GaN oxide-formed two-step wet-etching method

〇Yasuharu Kiyotou¹, Hiroshi Fujioka², Narihiko Maeda¹ (1.Tokyo Univ. of Tech., 2.IIS, The Univ. of Tokyo)