Masashi Kato(Nagoya Inst. of Tech.), Taketomo Sato(Hokkaido Univ.)
Masashi Kato
Chairperson, etc.
Fri. Sep 20, 2019 1:30 PM - 5:35 PM E301 (E301)
- Symposium (Oral)
- | Symposium (technical)
- | Etching Technology for Nitride Semiconductors: recent progress in high-controllable and low-damaging process
Wed. Sep 18, 2019 1:00 PM - 6:00 PM N302 (N302)
- Oral presentation
- | 13 Semiconductors
- | 13.7 Compound and power electron devices and process technology
Masashi Kato(Nagoya Inst. of Tech.), Taketomo Sato(Hokkaido Univ.)
Thu. Sep 19, 2019 9:00 AM - 12:00 PM E301 (E301)
- Oral presentation
- | 13 Semiconductors
- | 13.7 Compound and power electron devices and process technology
Masashi Kato(Nagoya Inst. of Tech.)