9:45 AM - 10:00 AM
[18a-C309-4] Thermal etching reactions of acetylacetone with transition metals
Keywords:Atomic layer etching, transition metal
Oral presentation
8 Plasma Electronics » 8.2 Plasma deposition of thin film, plasma etching and surface treatment
Wed. Sep 18, 2019 9:00 AM - 12:00 PM C309 (C309)
Keiichiro Urabe(Kyoto Univ.), Takayoshi Tsutsumi(名大)
9:45 AM - 10:00 AM
Keywords:Atomic layer etching, transition metal