10:45 AM - 11:00 AM
△ [18a-C309-6] Potential structure analysis of a capillary plate in a dual frequency CCP
Keywords:Dual frequency CCP, Spatial potential structure
Presentation information
Oral presentation
8 Plasma Electronics » 8.2 Plasma deposition of thin film, plasma etching and surface treatment
[18a-C309-1~10] 8.2 Plasma deposition of thin film, plasma etching and surface treatment
Wed. Sep 18, 2019 9:00 AM - 12:00 PM C309 (C309)
Keiichiro Urabe(Kyoto Univ.), Takayoshi Tsutsumi(名大)