The 80th JSAP Autumn Meeting 2019

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Oral presentation

13 Semiconductors » 13.1 Fundamental properties, surface and interface, and simulations of Si related materials

[18a-E303-1~12] 13.1 Fundamental properties, surface and interface, and simulations of Si related materials

Wed. Sep 18, 2019 9:00 AM - 12:15 PM E303 (E303)

Koichiro Saga(Sony), Takashi Hasunuma(Univ. of Tsukuba)

9:30 AM - 9:45 AM

[18a-E303-3] Effects of skin layer on friction of PVA brushes

〇Keishi Yamada1, Toshiyuki Sanada1, Yuki Mizushima1, Akira Fukunaga2, Hirokuni Hiyama2 (1.Shizuoka Univ., 2.Ebara Corp.)

Keywords:PVA brush, Skin layer, Post CMP cleaning