The 80th JSAP Autumn Meeting 2019

Presentation information

Oral presentation

13 Semiconductors » 13.4 Si processing /Si based thin film / MEMS / Equipment technology

[18a-E304-1~9] 13.4 Si processing /Si based thin film / MEMS / Equipment technology

Wed. Sep 18, 2019 9:30 AM - 11:45 AM E304 (E304)

Seiichiro Higashi(Hiroshima Univ.), Tatsuya Okada(Univ. of the Ryukyus)

11:15 AM - 11:30 AM

[18a-E304-8] Solid-Phase Crystallization of As-doped Amorphous Ge on Glass Leading to High Electron Mobility

Masaya Saito1, Kenta Moto1, Takeshi Nishida1, Takashi Suemasu1, Kaoru Toko1 (1.Univ. of Tsukuba)

Keywords:Ge, thin film semiconductor, solid-phase crystallization